Fabrication of Ordered Nano-Cell Structure on Ge Surface by Focused Ion Beam
نویسندگان
چکیده
منابع مشابه
Highly ordered Ga nanodroplets on a GaAs surface formed by a focused ion beam.
The morphological evolution of a GaAs surface induced by a focused ion beam (FIB) has been investigated by in situ electron microscopy. Under off-normal bombardment without sample rotation, Ga droplets with sizes from 70 to 25 nm in diameter on the GaAs surface can self-assemble into a highly ordered hexagonal pattern instead of Ostwald ripening or coalescence. The mechanism relies on a balance...
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Selective Ga + ion implantation and miring by focused ion beam exposure and subsequent wet chemical etching is used to fabricate micro/nanomechanical elements in Si. Freestanding elements with a ~ 30 nm membrane thickness are made by controlled selective underetching between unexposed and exposed areas. Ultrahigh-frequency cantilever beams have been made with resonances in the tens of MHz range...
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متن کاملFocused Ion Beam Fabrication of Individual Carbon Nanotube Devices
Focused ion beam (FIB) techniques have found many applications in nanoscience and nanotechnology applications in recent years. However, not much work has been done using FIB to fabricate carbon nanotube devices. This is mainly due to the fact that carbon nanotubes are very fragile and energetic ion beam from FIB can easily damage the carbon nanotubes. Here we report the fabrication of carbon na...
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ژورنال
عنوان ژورنال: Journal of the Japan Institute of Metals
سال: 2013
ISSN: 0021-4876,1880-6880
DOI: 10.2320/jinstmet.77.64